Role of micro-nano fabrication process on the temperature coefficient of resistance of platinum thin films resistance temperature detector
Weiming Lv, Yiqun Wang, Wenhua Shi, Wei Cheng, Rong Huang, Ruifang Zhong, Zhongming Zeng, Yaming Fan, Baoshun Zhang
Topics & Concepts
Materials scienceAnnealing (glass)Temperature coefficientFabricationPlatinumResistance thermometerThin filmNanotechnologyComposite materialMetallurgyChemical engineeringTemperature measurementChemistryCatalysisBiochemistryAlternative medicineEngineeringPathologyQuantum mechanicsMedicinePhysicsAdvanced Sensor Technologies ResearchElectrical and Thermal Properties of MaterialsAdvanced MEMS and NEMS Technologies