Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations
Akula Umamaheswara Rao, Sunil Kumar Tiwari, Manjeet Singh Goyat, Amit Kumar Chawla
Topics & Concepts
Materials sciencePhysical vapor depositionTribologySputter depositionCoatingNanocompositeSilicon nitrideSputteringOptical coatingSiliconNitrideComposite materialTitanium nitrideMetallurgyNanotechnologyThin filmLayer (electronics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research