Formation and elimination mechanism of thermal blistering in Al2O3/Si system
Shuai Zhao, Guodong Yuan, Di Zhang, Pengfei Xu, Guozheng Li, Weihua Han
Topics & Concepts
Materials scienceBlistersDielectricDelamination (geology)PermittivityComposite materialThermalImpurityOxideOptoelectronicsMetallurgyOrganic chemistryPhysicsChemistryPaleontologyMeteorologyBiologyTectonicsSubductionSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignSilicon and Solar Cell Technologies