Advanced approach for oxygen transport and crystallization front calculation in Cz silicon crystal growth
Dmitriy Borisov, Vladimir Artemyev, V.V. Kalaev, Andrey Smirnov, A.T. Kuliev, Frank Zobel, R. Kunert, Raşit Turan, Ömür Işıl Aydin, İsmail Kabaçelik
Topics & Concepts
CrystallizationAnisotropyTurbulenceCrystal growthSiliconCrystal (programming language)Materials scienceWaferLimiting oxygen concentrationReynolds numberMechanicsOxygenChemistryThermodynamicsOpticsCrystallographyPhysicsNanotechnologyMetallurgyOrganic chemistryProgramming languageComputer scienceFluid Dynamics and Turbulent FlowsSolidification and crystal growth phenomenaFluid Dynamics and Thin Films