Shaped vibration cutting: A novel fabrication method for mid-infrared relief gratings with controllable profiles
Zhimeng Chen, Pingfa Feng, Jianfu Zhang, Feng Feng, Huawen Zhang, Jinhui Yu, Jianjian Wang
Topics & Concepts
GratingDiamond turningMaterials scienceFabricationVibrationPerpendicularGroove (engineering)OpticsSiliconDiamondOptoelectronicsComposite materialAcousticsMetallurgyPhysicsAlternative medicineMedicineMathematicsGeometryPathologyAdvanced Surface Polishing TechniquesOptical Coatings and GratingsLaser Material Processing Techniques