Progress in enhanced fluidization process for particle coating via atomic layer deposition
Zoushuang Li, Jiawei Li, Xiao Liu, Rong Chen
Topics & Concepts
FluidizationAtomic layer depositionCoatingMaterials scienceNanoparticleNanotechnologyFluidized bedAgglomerateDeposition (geology)Layer (electronics)Conformal coatingChemical engineeringChemistryComposite materialEngineeringOrganic chemistryPaleontologyBiologySedimentCatalytic Processes in Materials ScienceSemiconductor materials and devicesInnovative Microfluidic and Catalytic Techniques Innovation