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Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy

Tailong Liu, Teng Pan, Peng Wang, Shuijie Qin, Huikai Xie

2022Sensors and Actuators A Physical25 citationsDOI

Topics & Concepts

Microelectromechanical systemsOptical coherence tomographyDistortion (music)OpticsOptical transfer functionMaterials scienceDeformable mirrorTilt (camera)Sample (material)PhysicsAdaptive opticsOptoelectronicsEngineeringCMOSThermodynamicsMechanical engineeringAmplifierOptical Coherence Tomography ApplicationsAdvanced Surface Polishing TechniquesPhotoacoustic and Ultrasonic Imaging
Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy | Litcius