Formation of Zn-rich ZnO films with improved bulk and surface characteristics by approach of magnetron sputtering technique
Šarūnas Varnagiris, Marius Urbonavičius, Simona Tučkutė, Martynas Lelis
Topics & Concepts
Wurtzite crystal structureMaterials scienceSputter depositionThin filmCavity magnetronDeposition (geology)Surface roughnessHigh-power impulse magnetron sputteringAnalytical Chemistry (journal)DopantBand gapSputteringStoichiometryZincChemical engineeringNanotechnologyMetallurgyDopingComposite materialChemistryOptoelectronicsEngineeringPaleontologyOrganic chemistrySedimentBiologyChromatographyZnO doping and propertiesCopper-based nanomaterials and applicationsGa2O3 and related materials