Air-based sputtering deposition of titanium oxynitride-based single, gradient, and multi-layer thin films for photoelectrochemical applications
Xin-Xian Yang, Fu‐Hsing Lu
Topics & Concepts
Materials scienceTinAmorphous solidSputteringThin filmLayer (electronics)Titanium nitrideSputter depositionTin oxideDeposition (geology)OptoelectronicsTitaniumNanotechnologyNitrideMetallurgyPaleontologyBiologyDopingOrganic chemistryChemistrySedimentAdvanced Photocatalysis TechniquesZnO doping and propertiesElectronic and Structural Properties of Oxides