Selectivity in atomically precise etching: Thermal atomic layer etching of a CoFeB alloy and its protection by MgO
Mahsa Konh, Yang Wang, Hang Chen, Subhash Bhatt, John Q. Xiao, Andrew V. Teplyakov
Topics & Concepts
Materials scienceEtching (microfabrication)X-ray photoelectron spectroscopyAlloyLayer (electronics)Dry etchingThermal desorptionReactive-ion etchingDesorptionAnalytical Chemistry (journal)NanotechnologyChemical engineeringOptoelectronicsComposite materialAdsorptionChemistryEngineeringChromatographyOrganic chemistrySemiconductor materials and devicesElectronic and Structural Properties of OxidesPlasma Diagnostics and Applications