Fabrication of an In-rich IGZO TFT by Co-sputtering of In2O3 and IGZO and Characterization of its Compensated Positive Bias Stress Properties

Yedam Lee, Hyunsoo Kim, Hyerin Jo, Hongseok Oh

2024Transactions on Electrical and Electronic Materials13 citationsDOI

Topics & Concepts

Materials scienceSputteringFabricationThin-film transistorCharacterization (materials science)Stress (linguistics)OptoelectronicsNanotechnologyThin filmLayer (electronics)MedicinePhilosophyAlternative medicineLinguisticsPathologyThin-Film Transistor TechnologiesTransition Metal Oxide NanomaterialsElectrical and Thermal Properties of Materials