Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate
Xi Yu, Yuki Yasunaga, Kazusa Goto, Dejun Liu, Shingo Ono
Topics & Concepts
Materials scienceFemtosecondLaserOpticsTerahertz radiationSubstrate (aquarium)Refractive indexOptoelectronicsSiliconAnti-reflective coatingFinite-difference time-domain methodLayer (electronics)NanotechnologyOceanographyPhysicsGeologyPhotonic and Optical DevicesOptical Coatings and GratingsTerahertz technology and applications