Process temperature-dependent interface quality and Maxwell–Wagner interfacial polarization in atomic layer deposited Al<sub>2</sub>O<sub>3</sub>/TiO<sub>2</sub> nanolaminates for energy storage applications
Partha Sarathi Padhi, R. S. Ajimsha, S. K. Rai, U. K. Goutam, Aniruddha Bose, S. Bhartiya, Pankaj Misra
Abstract
The dielectric and electrical characteristics of ATA NLs were significantly enhanced owing to a considerable improvement in the conductivity contrast between sublayers and a substantial decrement in impurity/contaminant concentration.
Topics & Concepts
DielectricMaterials scienceAtomic layer depositionAnalytical Chemistry (journal)OxideCapacitanceHigh-κ dielectricPolarization (electrochemistry)Current densityConductivityThin filmOptoelectronicsNanotechnologyChemistryElectrodeChromatographyPhysical chemistryQuantum mechanicsPhysicsMetallurgySemiconductor materials and devicesDielectric properties of ceramicsFerroelectric and Piezoelectric Materials