Synergistic effect of deposition temperature and substrate bias on structural, mechanical, stability and adhesion of TiN thin film prepared by reactive HiPIMS
Olayinka Oluwatosin Abegunde, Mohamed Lahouij, Nassima Jaghar, Hicham Larhlimi, M. Makha, Jones Alami
Topics & Concepts
Materials scienceThin filmHigh-power impulse magnetron sputteringTinComposite materialTitanium nitrideSubstrate (aquarium)Sputter depositionToughnessPhysical vapor depositionPulsed laser depositionSputteringNitrideMetallurgyLayer (electronics)NanotechnologyOceanographyGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research