Fabrication and characterization of a miniaturized octupole deflection system for the MEMS electron microscope
M. Krysztof, Marcin Białas, Piotr Szyszka, Tomasz Grzebyk, Anna Górecka-Drzazga
Topics & Concepts
Scanning electron microscopeMicroelectromechanical systemsElectrodeCathode raySiliconAnodeMaterials scienceElectron beam-induced depositionCathodeFabricationField electron emissionOpticsOptoelectronicsElectronScanning transmission electron microscopyAnalytical Chemistry (journal)ChemistryPhysicsPhysical chemistryPathologyMedicineChromatographyQuantum mechanicsAlternative medicineElectron and X-Ray Spectroscopy TechniquesAdvanced Electron Microscopy Techniques and ApplicationsForce Microscopy Techniques and Applications