Embedded racetrack microring resonator sensor based on GeSbSe glasses
Zhiyong Li, Cheng Hou, Ye Luo, Wei Zhang, Lan Li, Peipeng Xu, Tiefeng Xu
Abstract
In this article, a compact racetrack double microring resonator (MRR) sensor based on Ge 28 Sb 12 Se 60 (GeSbSe) is investigated. The sensor device consists of a racetrack microring, an embedded small microring, and a strip waveguide. Electron beam lithography (EBL) and dry etching are used to fabricate the device. The compact racetrack double MRR device are obtained with Q-factor equal to 7.17 × 10 4 and FSR of 24 nm by measuring the transmission spectrum. By measuring different concentrations of glucose solutions, a sensitivity of 297 nm/RIU by linear fitting and an intrinsic limit of detection (iLOD) of 7.40 × 10 −5 are obtained. It paves the way for the application of chalcogenide glasses in the field of biosensing.