Influence of exposure energy and heat treatment conditions on through-glass via metallization of photoetchable glass interposers
Tianpeng Liang, Jihua Zhang, Hongwei Chen, Libin Gao, Sheng Qu, Haolin Zhao, Vincent G. Harris
Topics & Concepts
Materials scienceInterposerAnnealing (glass)WaferOptoelectronicsFabricationSputter depositionElectronic circuitThin filmComposite materialSputteringNanotechnologyLayer (electronics)Electrical engineeringPathologyAlternative medicineEtching (microfabrication)MedicineEngineering3D IC and TSV technologiesAdditive Manufacturing and 3D Printing TechnologiesNanofabrication and Lithography Techniques