Development of Silicon Carbide Atomic Layer Etching Technology
Kang-Il Lee, Dong Chan Seok, Soo Ouk Jang, Yong Sup Choi
Topics & Concepts
Materials scienceEtching (microfabrication)PolishingSurface roughnessSilicon carbideSiliconReactive-ion etchingSurface finishIsotropic etchingLayer (electronics)Plasma etchingThermal oxidationOptoelectronicsComposite materialNanotechnologyPlasma Diagnostics and ApplicationsSemiconductor materials and devicesDiamond and Carbon-based Materials Research