Cubic-structure Al-rich TiAlSiN thin films grown by hybrid high-power impulse magnetron co-sputtering with synchronized Al+ irradiation
Zhengtao Wu, Qimin Wang, I. Petrov, J.E. Greene, Lars Hultman, Grzegorz Greczyński
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionMetallurgyThin filmCavity magnetronComposite materialSputteringAnalytical Chemistry (journal)NanotechnologyChemistryChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research