Enhanced kalman-filtering iterative learning control with application to a wafer scanner
Yang Liu, Li Li, Xiaofeng Yang, Jiubin Tan
Topics & Concepts
Iterative learning controlControl theory (sociology)Feed forwardKalman filterRobustness (evolution)Computer scienceFilter (signal processing)Convergence (economics)AlgorithmArtificial intelligenceEngineeringControl engineeringControl (management)Computer visionEconomic growthGeneEconomicsChemistryBiochemistryIterative Learning Control SystemsAdvanced machining processes and optimizationAdvanced Measurement and Metrology Techniques