Adhesionable flexible GaN-based microLED array film to brain surface for in vivo optogenetic stimulation
Hiroto Sekiguchi, Hayate Matsuhira, Ryota Kanda, Shuto Tada, Taiki Kitade, Masataka Tsutsumi, Atsushi Nishikawa, Alexander Loesing, Izumi Fukunaga, Susumu Setogawa, Noriaki Ohkawa
Abstract
Abstract A development of a biocompatible, optical stimulation device capable of adhering to the brain surface and activating spatially separated brain regions is necessary for in vivo optogenetic applications. In this study, a hollow structure for isolating the microLED epitaxial layer was fabricated using the anisotropic KOH wet-etching method. Using a thermal release sheet, a method to transfer microLEDs onto a biocompatible parylene film was established without rotation or misalignment of the microLEDs while retaining their characteristics. Accordingly, a flexible microLED array film was fabricated, which adhered to the surface of the brain of a mouse and exhibited blue emission.