Improving the adhesion of diamond-like carbon films on glass substrate by chemical etching and oxygen plasma treatment
Yongliu Zhou, Yuan Liu, Hui Song, Junge Li, Yujie Shu, Jianxiong He, Hong Jiang, Chunrong Xiong
Topics & Concepts
Materials scienceAdhesionComposite materialDiamond-like carbonSubstrate (aquarium)Etching (microfabrication)X-ray photoelectron spectroscopyCarbon fibersIsotropic etchingSputter depositionDiamondSputteringNanotechnologyThin filmChemical engineeringComposite numberLayer (electronics)EngineeringGeologyOceanographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques