Athermal annealing of pre-existing defects in crystalline silicon
M. Bǎlǎceanu, D. Iancu, Eva Zarkadoula, R.A. Florin, Y. Tong, Yanwen Zhang, William J. Weber, Gihan Velişa
Topics & Concepts
Materials scienceAnnealing (glass)SiliconDopantIrradiationIonCrystallographic defectThermalChemical physicsSemiconductorOptoelectronicsMolecular physicsDopingCrystallographyComposite materialThermodynamicsNuclear physicsQuantum mechanicsPhysicsChemistrySemiconductor materials and devicesSilicon and Solar Cell TechnologiesIon-surface interactions and analysis