High-Q collective Mie resonances in monocrystalline silicon nanoantenna arrays for the visible light
Zhenghe Zhang, Pengbo Liu, Wanli Lu, Ping Bai, Bingchang Zhang, Zefeng Chen, Stefan A. Maier, Jaime Gómez Rivas, Shaojun Wang, Xiaofeng Li
Abstract
Dielectric optical antennas have emerged as a promising nanophotonic architecture for manipulating the propagation and localization of light. However, the optically induced Mie resonances in an isolated nanoantenna are normally with broad spectra and poor Q-factors, limiting their performances in sensing, lasing, and nonlinear optics. Here, we dramatically enhance the Q-factors of Mie resonances in silicon (Si) nanoparticles across the optical band by arranging the nanoparticles in a periodic lattice. We select monocrystalline Si with negligible material losses and develop a unique method to fabricate nanoparticle arrays on a quartz substrate. By extinction dispersion measurements and electromagnetic analysis, we can identify three types of collective Mie resonances with Q-factors ∼ 500 in the same nanocylinder arrays, including surface lattice resonances, bound states in the continuum, and quasi-guided modes. Our work paves the way for fundamental research in strong light-matter interactions and the design of highly efficient light-emitting metasurfaces.