Annealing effects on a-SiC:H and a-SiCN:H films deposited by plasma CVD methods
S. Peter, Rico Ehrler, Thomas Seyller, Florian Speck
Topics & Concepts
Materials scienceNanoindentationElastic recoil detectionAnnealing (glass)Rutherford backscattering spectrometryComposite materialAnalytical Chemistry (journal)X-ray photoelectron spectroscopyAmorphous solidYoung's modulusSilicon carbideElastic modulusElectron cyclotron resonanceThin filmPlasmaCrystallographyChemistryNuclear magnetic resonanceNanotechnologyQuantum mechanicsPhysicsChromatographyThin-Film Transistor TechnologiesCopper Interconnects and ReliabilityZnO doping and properties