Fatigue-induced dynamic pull-in instability in electrically actuated microbeam resonators
Shun Zhang, Jin Zhang
Topics & Concepts
MicrobeamMicroelectromechanical systemsResonatorCoalescence (physics)Materials scienceInstabilityMechanicsStructural engineeringOptoelectronicsOpticsEngineeringPhysicsAstrobiologyAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications