Femtosecond laser modification of silicon carbide substrates and its influence on CMP process
Xiaozhu Xie, Qingfa Peng, Gaopan Chen, Jianguo Li, Jiangyou Long, Guoshun Pan
Topics & Concepts
Materials scienceFluenceSilicon carbideLaserIrradiationFemtosecondPolishingSiliconSubstrate (aquarium)Surface roughnessChemical-mechanical planarizationLaser ablationFlatness (cosmology)Surface finishComposite materialOptoelectronicsOpticsPhysicsCosmologyQuantum mechanicsNuclear physicsOceanographyGeologyAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research