A 2-DOF High-Performances Platform Using a Longitudinal-Bending-Bending Piezoelectric Actuator
Jianxing Li, Shijing Zhang, Jie Deng, Yingxiang Liu
Abstract
The two-degree-of-freedom (2-DOF) platform is a critical device in micromanipulation and microobservation systems for transporting and positioning objects. Constrained by actuation methods and structural limitations, existing platforms struggle to simultaneously achieve high-frequency, cross scale, and large load capacity. In this work, we developed a 2-DOF high-performances piezoelectric scanning platform (PESP) utilizing a longitudinal-bending-bending piezoelectric actuator (LBB-PEA). A cooptimization method of stiffness and displacement is proposed to optimize the longitudinal unit of LBB-PEA, and the finite element simulation is carried out. The longitudinal unit is used to lock and unlock the PESP, which can switch between stick–stick mode and stick–slip mode to achieve high-frequency scanning motion and cross-scale motion. The PESP has highest scanning frequency of 162 Hz, large stroke of 3.5 × 3.5 cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup>, resolution of 12 nm, and load capacity of 25 kg, which enables the manipulated objects to achieve high-frequency scanning motion and cross-scale motion. The PESP is applied to microscopic observation, which provides new idea for the design of 2-DOF motion platform for micromanipulation and microobservation systems.