Stability enhancement of the nitrogen-doped ITO thin films at high temperatures using two-step mixed atmosphere annealing technique
Zhichun Liu, Junsheng Liang, Hao Zhou, Wenqi Lu, Jian Li, Biling Wang, Qiang Li, Xin Zhao, Jun Xu
Topics & Concepts
Annealing (glass)Materials scienceThin filmNitrogenOxygenDopingAnalytical Chemistry (journal)Chemical engineeringComposite materialNanotechnologyOptoelectronicsChemistryEnvironmental chemistryOrganic chemistryEngineeringAdvanced Sensor Technologies ResearchScientific Measurement and Uncertainty EvaluationAdvanced Measurement and Metrology Techniques