An efficient catalytic composite abrasive cluster with excellent catalytic and micro-cutting capabilities in the friction chemical polishing processes
Zhankui Wang, Yangyang Ding, Shangci Huang, Pengzhan Wang, Hongyuan Zhao, Yunlong Yao, Minghua Pang, Fengming Qin, Lijie Ma, Jianxiu Su
Topics & Concepts
PolishingMaterials scienceAbrasiveDiamondSurface roughnessWaferComposite numberChemical-mechanical planarizationComposite materialCrystal (programming language)Surface finishNanotechnologyComputer scienceProgramming languageDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites