Laser machining of free-standing silicon nitride membranes
Xitong Xie, Roghayeh Nikbakht, Martin Couillard, Raphaël St-Gelais, Arnaud Weck
Topics & Concepts
Materials scienceMachiningLaserSilicon nitrideLaser beam machiningMembraneOptoelectronicsComposite materialSiliconOpticsMetallurgyGeneticsBiologyPhysicsLaser beamsNanowire Synthesis and ApplicationsAdvanced Surface Polishing TechniquesLaser Material Processing Techniques