High quality thermochromic VO2 thin films deposited at room temperature by balanced and unbalanced HiPIMS
Jean-Louis Victor, Corinne Marcel, Laurent Sauques, Nicolas Penin, Aline Rougier
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceCavity magnetronThin filmSputter depositionThermochromismOptoelectronicsCrystallinityAnnealing (glass)Analytical Chemistry (journal)TransmittanceSputteringNanotechnologyComposite materialChemistryChromatographyOrganic chemistryTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsGa2O3 and related materials