Role of Defects in the Breakdown Phenomenon of Al<sub>1–<i>x</i></sub>Sc<sub><i>x</i></sub>N: From Ferroelectric to Filamentary Resistive Switching
Roberto Guido, Thomas Mikolajick, Uwe Schroeder, Patrick D. Lomenzo
Abstract
Aluminum scandium nitride (Al 1– x Sc x N), with its large remanent polarization, is an attractive material for high-density ferroelectric random-access memories. However, the cycling endurance of Al 1– x Sc x N ferroelectric capacitors is far below what can be achieved in other ferroelectric materials. Understanding the nature and dynamics of the breakdown mechanism is of the utmost importance for improving memory reliability. The breakdown phenomenon in ferroelectric Al 1– x Sc x N is proposed to be an impulse thermal filamentary-driven process along preferential defective pathways. For the first time, stable and robust bipolar filamentary resistive switching in ferroelectric Al 1– x Sc x N is reported. A hot atom damage defect generation model illustrates how filament formation and ferroelectric switching are connected. The model reveals the tendency of the ferroelectric wurtzite-type Al 1– x Sc x N system to reach internal symmetry with bipolar electric field cycling. Defects generated from bipolar electric field cycling influence both the energy barrier between the polarization states and that required for the filament formation.