Gas sensitivity of PECVD β-Ga2O3 films with large active surface
А. V. Аlmaev, Nikita N. Yakovlev, Е. В. Черников, N. N. Erzakova, Leonid Mochalov, Mikhail Kudryashov, YuP. Kudryashova, С. Н. Несов
Topics & Concepts
Plasma-enhanced chemical vapor depositionSensitivity (control systems)Materials scienceSurface (topology)NanotechnologyThin filmElectronic engineeringMathematicsEngineeringGeometryGa2O3 and related materialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors