Etch pit formation on β-Ga2O3 by molten KOH+NaOH and hot H3PO4 and their correlation with dislocations
Yongzhao Yao, Yoshihiro Sugawara, K. Satô, Daisaku Yokoe, Kohei Sasaki, Akito Kuramata, Yukari Ishikawa
Topics & Concepts
DislocationPolishingMaterials scienceTransmission electron microscopyCrystallographyEtching (microfabrication)Burgers vectorComposite materialChemistryLayer (electronics)NanotechnologyGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices