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Etch pit formation on β-Ga2O3 by molten KOH+NaOH and hot H3PO4 and their correlation with dislocations

Yongzhao Yao, Yoshihiro Sugawara, K. Satô, Daisaku Yokoe, Kohei Sasaki, Akito Kuramata, Yukari Ishikawa

2022Journal of Alloys and Compounds18 citationsDOI

Topics & Concepts

DislocationPolishingMaterials scienceTransmission electron microscopyCrystallographyEtching (microfabrication)Burgers vectorComposite materialChemistryLayer (electronics)NanotechnologyGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices
Etch pit formation on β-Ga2O3 by molten KOH+NaOH and hot H3PO4 and their correlation with dislocations | Litcius