On the passivation performance of SiNx, SiOxNy and their stack on c-Si wafers for solar cell applications: Correlation with optical, chemical and interface properties
Hasan Hüseyin Canar, Gence Bektaş, Raşit Turan
Topics & Concepts
PassivationWaferMaterials sciencePlasma-enhanced chemical vapor depositionStack (abstract data type)Solar cellSilicon oxynitrideOptoelectronicsSiliconRefractive indexAnalytical Chemistry (journal)Layer (electronics)Silicon nitrideNanotechnologyChemistryComputer scienceProgramming languageChromatographySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSemiconductor materials and interfaces