Optical Lithography Beyond Projection Imaging

Abstract

This chapter provides an overview of diverse alternative optical lithography techniques that do not employ projection imaging of a mask. People with exclusive interest in projection lithography for semiconductor lithography can skip this chapter. For others it provides an overview of alternative optical lithography methods for alternative applications, including a more in-depth discussion of the optical nonlinearities that were already briefly addressed in Section 5.2.

Topics & Concepts