Improved machinability of single crystal silicon by applying in-situ laser-vibration hybrid assisted diamond cutting
Jianguo Zhang, Xinhuan Li, Yufan Fu, Yunxiang Zheng, Honglei Mo, Xiao Chen, Junfeng Xiao, Jianfeng Xu
Topics & Concepts
Materials scienceDiamond turningMachinabilitySiliconMachiningBrittlenessDiamondDiamond cuttingLaserDiamond toolComposite materialMetallurgyOptoelectronicsOpticsPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research