A metal lift-off process through hyperbolic undercut of laser heat-mode lithography
Zhengwei Wang, Kui Zhang, Guodong Chen, Zhu Zhendong, Yang Wang, Jingsong Wei
Topics & Concepts
UndercutMaterials scienceLithographyLift (data mining)LaserMaskless lithographyPhotolithographyFabricationOpticsOptoelectronicsElectron-beam lithographyResistComposite materialLayer (electronics)Computer sciencePathologyData miningAlternative medicinePhysicsMedicineNanofabrication and Lithography TechniquesMetal and Thin Film MechanicsAdhesion, Friction, and Surface Interactions