Atomistic-mesoscopic modeling of area-selective thermal atomic layer deposition
Sungil Yun, Feiyang Ou, Henrik Wang, Matthew Tom, Gerassimos Orkoulas, Panagiotis D. Christofides
Topics & Concepts
Mesoscopic physicsAtomic layer depositionDeposition (geology)ThermalLayer (electronics)Materials scienceNanotechnologyChemical engineeringChemical physicsChemistryPhysicsCondensed matter physicsThermodynamicsEngineeringGeologyPaleontologySedimentSemiconductor materials and devicesElectronic and Structural Properties of OxidesAdvancements in Semiconductor Devices and Circuit Design