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Micro-Electromechanical Systems-based Sensors and Their Applications

Sophia Nazir, Oh Seok Kwon

2022Applied Science and Convergence Technology38 citationsDOIOpen Access PDF

Topics & Concepts

Computer scienceMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesGas Sensing Nanomaterials and Sensors
Micro-Electromechanical Systems-based Sensors and Their Applications | Litcius