Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film
Zilong Zhang, Liwen Sang, Jian Huang, Waiyan Chen, Linjun Wang, Y. K. Takahashi, Seiji Mitani, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
Topics & Concepts
Materials scienceDiamondMicroelectromechanical systemsMagnetic fieldOptoelectronicsDopantSensitivity (control systems)Amorphous solidDopingNuclear magnetic resonanceComposite materialElectronic engineeringChemistryEngineeringOrganic chemistryQuantum mechanicsPhysicsDiamond and Carbon-based Materials ResearchMagnetic Field Sensors TechniquesMagneto-Optical Properties and Applications