Towards sub-10 nm spatial resolution by tender X-ray ptychographic coherent diffraction imaging
Nozomu Ishiguro, Fusae Kaneko, Masaki Abe, Yuki Takayama, Junya Yoshida, Taiki Hoshino, Shuntaro Takazawa, Hideshi Uematsu, Yuhei Sasaki, Naru Okawa, Keichi Takahashi, Hiroyuki Takizawa, Hiroyuki Kishimoto, Yukio Takahashi
Abstract
Abstract As the first experiment at BL10U in NanoTerasu, tender X-ray ptychographic coherent diffraction imaging (PCDI) was conducted using a photon energy of 3.5 keV. The ptychographic diffraction patterns from a 200 nm thick Ta test chart and a micrometer-sized particle of sulfurized polymer were collected. Subsequently, phase images were reconstructed with resolutions of sub-20 nm and sub-50 nm, respectively. In the near future, tender X-ray PCDI with sub-10 nm resolution is anticipated to potentially revolutionize the visualization of nanoscale structures and chemical states in various functional materials composed of light elements.