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Influence of oxygen partial pressure on the strain behaviour of reactively co-sputtered Ga doped ZnO thin films

Shravan K. Appani, Devendra Narain Singh, Raju Nandi, D.S. Sutar, S.S. Major

2022Thin Solid Films14 citationsDOI

Topics & Concepts

Materials scienceCrystallinityCrystallitePartial pressureSputteringX-ray photoelectron spectroscopyThin filmRaman spectroscopyOxygenDopingAnalytical Chemistry (journal)Composite materialChemical engineeringNanotechnologyOpticsMetallurgyOptoelectronicsChemistryPhysicsOrganic chemistryChromatographyEngineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsGa2O3 and related materials
Influence of oxygen partial pressure on the strain behaviour of reactively co-sputtered Ga doped ZnO thin films | Litcius