Design and Analysis of a 2-D Piezoelectric Platform Based on Three-Stage Amplification and L-Shaped Guiding
Xiaoqing Yuan, Yuxuan Liu, Huan Zou, Junjie Ji, Tong Zhou, Wendong Wang
Abstract
In piezoelectric micro-positioning platforms, the displacement amplification mechanism can solve the small output displacement of the platform; the displacement coupling will also increase when the displacement is amplified. To solve the problem of multistage displacement amplification and displacement coupling after multistage displacement amplification, this study proposes a two-dimensional piezoelectric platform based on three-stage amplification and L-shaped guiding. First, the structure of the two-dimensional piezoelectric platform is designed and its working principle is described. Next, the two-dimensional piezoelectric platform is analyzed theoretically, and the static and dynamic characteristics of the structure are analyzed by the finite element method. Finally, a prototype of the two-dimensional piezoelectric platform is fabricated, and the theoretical and simulation results are analyzed experimentally. The experimental results reveal that the platform has a motion range of 31.8 μm × 41 μm. The multistage displacement amplification ratio is 21.8, and the displacement coupling error is less than 4.2%. The positioning error of the closed-loop control platform is less than 0.5%, and the trajectory tracking error is less than 1.6%. Compared with the traditional piezoelectric micro-positioning platform, the three-stage amplification and L-shaped guiding mechanism can effectively improve the displacement magnification and decoupling performance of the piezoelectric micro-positioning platform as well as the positioning ability and trajectory tracking ability of the platform under closed-loop control, which is expected to be utilized in fields such as multi-stage amplification micro-positioning platforms and dynamic optical systems.