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Microstructure, infrared optical properties and thermal stability of ZrB2 and double-layer-structure Al2O3/ZrB2 thin films by magnetron sputtering technique

Min Zhang, Xiaodong Ma, Juhang Yin, Yin Zhang⋆, Li Zhang, Jing Wen, Linglu Dai, Renxiong Kuang, Haiyan Chen, Xiaolong Weng, Xiaohui Zhao, Difei Liang, Jianliang Xie, Longjiang Deng

2020Applied Surface Science25 citationsDOI

Topics & Concepts

Materials scienceThin filmEmissivitySputter depositionMicrostructureAnnealing (glass)InfraredFourier transform infrared spectroscopyThermal stabilityScanning electron microscopeAnalytical Chemistry (journal)Low emissivityLayer (electronics)SputteringOpticsComposite materialNanotechnologyChemical engineeringChemistryPhysicsChromatographyEngineeringAdvanced ceramic materials synthesisMXene and MAX Phase MaterialsBoron and Carbon Nanomaterials Research
Microstructure, infrared optical properties and thermal stability of ZrB2 and double-layer-structure Al2O3/ZrB2 thin films by magnetron sputtering technique | Litcius