Microstructure evolution and enhanced permeation of SiC membranes derived from allylhydridopolycarbosilane
Qing Wang, Makoto Yokoji, Hiroki Nagasawa, Liang Yu, Masakoto Kanezashi, Toshinori Tsuru
Topics & Concepts
PermeationMembraneMicrostructureMaterials scienceChemical engineeringChemistryComposite materialEngineeringBiochemistryAdvanced ceramic materials synthesisMembrane Separation and Gas TransportCopper Interconnects and Reliability