Activation characterization of the Ti-Zr-V getter films deposited by magnetron sputtering
Sihui Wang, Zhiwei Wang, Xin Shu, Wei Wei, Yonghao Gao, Yong Wang
Topics & Concepts
GetterMaterials scienceX-ray photoelectron spectroscopyTitaniumSputter depositionZirconiumSputteringAnalytical Chemistry (journal)Thin filmVanadiumCavity magnetronMetallurgyChemical engineeringOptoelectronicsNanotechnologyChemistryChromatographyEngineeringAdvanced Materials Characterization TechniquesMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques