Remote dynamic actuation of an electrostatically driven microcantilever by a wireless power transfer system
Raul Ruiz, G. Abadal
Abstract
The design, modelling, fabrication and test of a device prototype, based on a microcantilever capacitively connected to a folded-end half-wave dipole antenna, which is remotely actuated by a wireless power transfer (WPT) system are presented here. The microcantilever and the antenna, which are coupled at the antenna feeding point, work as a new device, is able to harness the radiated energy wirelessly transferred from an emitter antenna to directly excite the mechanical vibration modes of the microcantilever. The response to an amplitude-modulated (AM) RF radiated signal excitation produced by a transmitting antenna is experimentally analysed and fit to a simple model when the distance between both antennas varies from the near field to the radiated far field regime.