Large Thermal Expansion LTCC System for Cofiring with Integrated Functional Ceramics Layers
Beate Capraro, Manuel Heidenreich, Jörg Töpfer
Abstract
We have studied the sintering behavior of CT708 LTCC tapes with large CTE of 10.6 ppm/K. This low-k dielectric LTCC material is a quartz-based glass ceramic composite system with partial crystallization of celsian upon firing. The shrinkage, densification and dielectric properties were examined using different heating rates and a sintering temperature of 900 °C. The maximum shrinkage rate is at 836 °C (for a heating rate of 2 K/min) with a sintering density of 95% and a permittivity of ε' = 5.9 and tan δ = 0.0004 (at 1 GHz). Due to their similar shrinkage and thermal expansion properties, CT708 tapes may be cofired with functional ceramic layers. As an example, we report on cofiring of a multilayer laminate of CT708 and a Sc-substituted hexagonal ferrite for applications as integrated microwave circulator components. This demonstrates the feasibility of cofiring of functional ceramic tapes and tailored LTCC tapes and documents the potential for the realization of complex LTCC multilayer architectures.